www.sensirion.com version 1 C july 2016 1 / 7 data sheet C SFM3200 digital flow meter for medical applications ? superior performance at very low flows ? low pressure drop ? inspiratory flow sensor ? flow range: up to 250 slm product summar y the SFM3200 sensor is sensirions digital flow meter designed fo r high - volume applications. the SFM3200 measure s the flow rate of air , oxygen and other non - aggressive gases with superb accuracy. a special design of the flow channel results in the very low pressure drop through the flow body of the sensor making it extremely suitable for medical ventilation and respiratory applications. the SFM3200 is designed to be resilient to rough handling and performs reliably at variable inlet conditions . the outstanding performance of these sensors is based on sensirions patented cmosens ? sensor technology , which combines the sensor element, signal processing and digital calibration on a single microchip. the flow rate of a gas is measured by a thermal sensor element which assures very fast signal processing time and bidirectional measurement mode with best i n class accuracy . the signal is internally linearized and temperature compensated . the well - proven cmos technology is perfectly suited for high - quality mass production and is the ideal choice for demanding and cost - sensitive oem applications . applications ? ventilation ? an esthesia ? respiratory measurements ? inspiratory flow measurement ? drug delivery oem options a variety of custom options can be implemented for high - volume oem applications (custom flow rates, calibration for other gases, different body form factor etc.). for a reusable version of this sensor see the SFM3200 - aw datasheet. contact us for more information. sensor chip the SFM3200 flow meter features a fifth - gen eration silicon sensor chip . in addition to a thermal mass flow sensor element, the chip contains an amplifier, a/d converter, eeprom memory, digital signal processing circuitry, and interface. due to seamless integration of signal acquisition and processing on the single silicon die significant performance and cost benefits are achieved.
www .sensirion.com version 1 C july 2016 2 / 7 1. sensor performanc e 1.1 physical specifications 1 parameter condition value unit flow range - 10 0 +250 slm 2 typ . 3 max 4 accuracy 5 span ( - 40 to +80) slm span ( - 60 to +100) slm span whole range offset 2 3 7 0.05 3 5 10 0. 1 % m.v. 6 % m.v 6 % m.v 6 slm 2 noise level 5 , 7 , 8 s pan < 5 0 slm s pan > 5 0 slm s pan >100 slm offset 0.6 1 .0 1.5 0.0 3 4 1.0 2 .0 4.5 0.0 7 % m.v 6 % m.v 6 % m.v 6 s lm 2 accuracy shift due to temperature variation 5 , 9 s pan offset 0.4 0.015 0.5 0.02 % m.v./10?c s lm 2 /10c resolution (14 bit) 5 span offset 0.07 0.034 % m.v . 6 s lm 2 pressure drop @ 60 slm @ 100 slm @ 200 slm 100 / 0.41 250 / 0.81 750 / 3.02 1 50 / 0.62 300 / 0.97 1100 / 4.44 pa / inh 2 o 1.2 ambient conditions parameter condition value unit calibrated temperature range t(environment)=t(gas); 15% rel. hum. +10 +50 c operating temperature range 10 - 95% rel. hum. (non cond.) + 10 +50 c storage temperature 10 - 95% rel. hum. (non cond.) - 25 +65 c operating pressure range absolute 0.60 C 1. 07 bar burst overpressure gauge 0. 78 bar 1 unless otherwise noted, all sensor specifications are valid at 25c with vdd = 5v a nd absolute pressure = 966 mbar and horiz ontal flow direction 2 slm: mass flow measured in liters per minute at standard conditions ( t = 20 c, p = 1013.25 mbar ) 3 for "typ" a cpk of 0.67 is targeted ( 95% of sensors within the typ limit ) 4 for "max" no sensor measured outside of this limits will be shipped and a cpk of 1.33 is targeted 5 total accuracy/noise level/resolution is a sum of zero - point and span accuracy/noise level/resolution. 6 %m.v. = % measured value = % of reading 7 one standard deviation, measured at full sampling rate without averaging 8 noise level defined as standard deviation of individual sensor readings, measured at full sampling rate (typ: average of nois e level ; max: at least 99.99% of sensors have a noise leve l below indicated value) 9 these effects need to be added to the initial values if applicable
www .sensirion.com version 1 C july 2016 3 / 7 1.3 media compatibility parameter value calibration air media c ompatibility air (non - condensing) , n 2 , o 2 , other non - aggressive gases wetted m aterials si, si 3 n 4 , sio x , gold, epoxy, glob top, ppsu, polyurethane , stainless steel rohs, reach rohs and reach the sensor can be used with gas mixtures, such as o 2 and air. plea se see application note: gf_an_SFM3200_sfm3300_effects_humidity_gas_mixtures for details. 2. electrical specifications 2.1 electrical characteristics electrical properties condition value unit interface i 2 c default sensor address 64 (h4 0) update time 14 bit 0.5 ms soft r eset t ime 80 ms start - up time 10 max. 100 m s supply voltage 5v +/ - 5% v communication level high low min max 2.5 gnd vdd 1.1 v power c onsumption < 5 0 mw electrical connector jst b4b - zr - sm4 - tf (male) output signal resolution 14 bit scale factor flow air 11 120 1/slm offset flow 32 10 after 4.75v is reached 11 for compensation for o2 and humidity see application note: gf_an_SFM3200_sfm3300_effects _humidity_gas_mixtures . 2.2 pin layout pin function 1 sda 2 gnd 3 vcc 4 sck 2.3 conversion to physical values in order to obtain the measured flow in [slm] , the measured value needs to be converted using the following formula: ???? [ ??? ] = ???????? ????? ? ?????? ???? ????? ?????? ???? please note that the first measurement performed directly after chip initialization is not valid. 1 2 3 4
www .sensirion.com version 1 C july 2016 4 / 7 3. mechanical specificati ons 3.1 connection with medical cones fitting s of the SFM3200 sensor correspond to the international standard iso5356 - 1 :2004 . details about this type of connection can be found in the description of the standard. 3.2 connection with o - ring o - ring socket : d 1 = 22 mm, d 2 = 1.5 mm o - ring cone : d 1 = 20 mm, d 2 = 1.5 mm 3.3 dimensions parameter value unit length 73.0 mm inner diameter 19 mm downstream conical cone 12 22 mm upstream conical socket 12 22 mm additional connection with o - rings possible (see above) - - weight <30 g all dimensions are in millimet r es (mm). 12 according to iso535 6 - 1:2004 c ross section of recommended o - ring 1
www .sensirion.com version 1 C july 2016 5 / 7 4. instructions for use 4.1 calibration orientation the sensors are calibrated horizontally as depicted in the following graph: 4.2 design guidelines in order to provide good flow conditions, the inner diameter of the connecting tube has to be approximately the same as the inner diameter of the sfm32 00 main flow channel. the inlet tube has to be straight and at least 10 cm in length. the sfm3 2 00 is equipped with meshes on the in - a nd out lets of the flow channel to reduce turbulences and thus improve the stability . please refer to the application note inlet conditions for the sfm3000 mass flow meters for more information. additionally, it is recommended to avoid placing the sensor such that the sensing element is at the bottom. this helps prevent deposition of matter (such as dust particles or water droplets) on the sensing element. 4.3 temperature compensation the SFM3200 sensor features digital temperature compensation. the temperat ure is measured on the cmosens ? chip by an on - chip temperature sensor. this data is fed to a compensation circuit that is also integrated on the cmosens ? sensor chip. thus, n o external temperature compensation is necessary. 4.4 sensor handling the packaging m ethod of the cmosens chip together with the inert housing and the sealing materials ensure a tight and highly resistant sealing of the device. please be aware that aggressive and corrosive gases can influence the sensor element and may even destroy the sea ling or the plastics body. please also be careful with the use of explosive or toxic gases. any leakage even outside the controller can be dangerous. for the above reasons, sensirion guarantees the safe use of the cmosens? mass flow meter for inert, in - ex plosive and non - toxic gases only. the s fm3200 sensor is designed to be robust and shock resistant. nevertheless, the accuracy of the high - precision sfm320 0 can be degraded by rough handling. sensirion does not guarantee proper operation in case of imprope r handling. note: avoid applying mechanical stress. 4.5 esd the electronics of the sfm32 00 sensor consist of a single automotive qualified chip. it complies with the following esd norms: - aec q 100 002 (4kv hbm) - aec q 100 003 (200v mm) although the sensor complies with these norms, it does not mean the sensor is immune against esd. the sensor is ship ped in an antistatic tray to prevent electrostatic discharge. to avoid damage to the sensor , ground yourself using a grounding strap or by touching a grounded o bject before touching the sensor . furthermore , store the parts in an antistatic package when not in use. 4.6 i 2 c interface and communication due to i 2 c interface restrictions, the cable length from the sensor to the microprocessor is recommended to be as shor t as possible and certainly not above 30 cm. for wires longer than 10 cm it is mandatory to shield the sda and scl. in case data is read from the sensor, the first data byte of the transaction must always be acknowledged by the master. it must be possible to reset the sensor through a hard reset, i.e. powering off and on the sensor, in case the sensor freezes. i 2 c communication details are given in the application note i 2 c functional description for sfm3000 series . 5. ordering information use the part names and product numbers shown in the table below when ordering SFM3200 sensors. for the latest product information and local distributors, visit www.sensirion.com . part name product number sfm3 200 1 - 101051 - 01 packaging units: 3 0 items/tray. every sensor is traceable by a unique serial number. positive f low direction (as marked on the sensor)
www .sensirion.com version 1 C july 2016 6 / 7 r evision history date author version changes july 2016 dat 1 release
www .sensirion.com version 1 C july 2016 7 / 7 important notices warning, personal injury do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury (including death). do not use this product for applications other than its intended and authorized use. before installing, handling, using or servicing this product, please consult the datasheet and application notes. failure to comply with these instructions could r esult in death or serious injury. if the buyer shall purchase or use sensirion products for any unintended or unauthorized application, buyer shall defend, indemnify and hold harmless sensirion and its officers, employees, subsidiaries, affiliates and dist ributors against all claims, costs, damages and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if sensirion shall be allegedly n egligent with respect to the design or the manufacture of the product. esd precautions the inherent design of this component causes it to be sensitive to electrostatic discharge (esd). to prevent esd - induced damage and/or degradation, take customary and st atutory esd precautions when handling this product. see application note handling instructions for more information. warranty sensirion warrants solely to the original purchaser of this product for a period of 12 months (one year) from the date of delivery that this product shall be of the quality, material and workmanship defined in sensirions published specifications of the product. within such period, if proven to be defective, sensirion shall repair and/or replace this product, in sensirions d iscretion, free of charge to the buyer, provided that: ? notice in writing describing the defects shall be given to sensirion within fourteen (14) days after their appearance; ? such defects shall be found, to sensirions reasonable satisfaction, to have aris en from sensirions faulty design, material, or workmanship; ? the defective product shall be returned to sensirions factory at the buyers expense; and ? the warranty period for any repaired or replaced product shall be limited to the unexpired portion of t he original period. this warranty does not apply to any equipment which has not been installed and used within the specifications recommended by sensirion for the intended and proper use of the equipment. except for the warranties expressly set forth herei n, sensirion makes no warranties, either express or implied, with respect to the product. any and all warranties, including without limitation, warranties of merchantability or fitness for a particular purpose, are expressly excluded and declined. sensirio n is only liable for defects of this product arising under the conditions of operation provided for in the datasheet and proper use of the goods. sensirion explicitly disclaims all warranties, express or implied, for any period during which the goods are o perated or stored not in accordance with the technical specifications. sensirion does not assume any liability arising out of any application or use of any product or circuit and specifically disclaims any and all liability, including without limitation co nsequential or incidental damages. all operating parameters, including without limitation recommended parameters, must be validated for each customers applications by customers technical experts. recommended parameters can and do vary in different applic ations. sensirion reserves the right, without further notice, (i) to change the product specifications and/or the information in this document and (ii) to improve reliability, functions and design of this product. copyright ? 201 6 , sensirion. cmosens ? is a trademark of sensirion all rights reserved headquarters and subsidiaries sensirion ag laubisruetistr. 50 ch - 8712 staefa zh switzerland phone: +41 44 306 40 00 fax: +41 44 306 40 30 info@sensirion.com www.sensirion.com sensirion inc., usa phone: +1 805 409 4900 info_us@sensirion.com www.sensirion.com sensirion japan co. ltd. phone: +81 3 3444 4940 info - jp@sensirion.com www.sensirion.co.jp sensirion korea co. ltd. phone: +82 31 337 7700~3 info - kr@sensirion.com www.sensirion.co.kr sensirion china co. ltd. phone: +86 755 8252 1501 info - cn@sensirion.com www.sensirion.com.cn sensirion ag (germany) phone: +41 44 927 11 66 info@sensirion.com www.sensirion.com to find your local representative, please visit www.sensirion.com/contact
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